Ldmos with enhanced safe operating area and method of manufacture

ABSTRACT

An integrated circuit comprising an n-type drift region, a gate structure directly on a first portion of the n-type drift region, a drain structure formed in a second portion of the n-type drift region, the gate structure and the drain structure being separated by a drift region length, a resist protective oxide (RPO) formed over a portion of the n-type drift region between the gate structure and the drain structure, a field plate contact providing a direct electrical connection to the resist protective oxide.

RELATED APPLICATION

This application is a divisional application of U.S. patent applicationSer. No. 17/177,953, filed Feb. 17, 2021, which claims the priority ofChina Application No. 202011216548.1 filed Nov. 4, 2020, the contents ofwhich are incorporated herein in their entireties.

BACKGROUND

LDMOS (laterally-diffused metal-oxide semiconductor) devices are planardouble-diffused MOSFET (metal-oxide-semiconductor field-effecttransistor) devices commonly used in amplifiers, including microwavepower amplifiers, RF (radio frequency) power amplifiers and audio poweramplifiers. Fabrication of LDMOS devices tends to include a sequence ofion-implantation processes and annealing cycles in order to produce adoping profile sufficient to withstand the electric fields generatedwithin the LDMOS devices during operation.

RF LDMOS (radio frequency LDMOS) devices are widely used inhigh-voltage, high-power RF power amplifier applications for frequenciesranging from 1 MHz to over 3.5 GHz and are a significant RF power devicetechnology used in expanding and maintaining cellular infrastructure. RFLDMOS devices are widely used power amplifiers in mobile networks suchas 4G and 5G cellular networks, and generally provide a desirablecombination of high output power with a corresponding drain to sourcebreakdown voltage in excess of 60V to allow their use in high voltageapplications.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 is a cross-sectional view of an LDMOS device structure accordingto some embodiments.

FIGS. 2A-2E are cross-sectional views of during manufacturing of anLDMOS device structure according to some embodiments.

FIGS. 3A-3B are graphs of comparative electron density data for LDMOSstructures according to some embodiments.

FIGS. 4A-4C are graphs of comparative parametric data for LDMOSstructures according to some embodiments.

FIGS. 5A-5G are graphs of simulated parametric data for various LDMOSstructures according to some embodiments of an LDMOS device according toFIG. 2E.

FIG. 6 is a flowchart of a method of manufacturing an LDMOS deviceaccording to some embodiments.

FIG. 7 is a schematic diagram of a system for manufacturing LDMOSdevices according to some embodiments.

FIG. 8 is a flowchart of IC device design, manufacture, and programming.

DETAILED DESCRIPTION

This description of the exemplary embodiments is intended to be read inconnection with the accompanying drawings, which are to be consideredpart of the entire written description. The following disclosureprovides many different embodiments, or examples, for implementingdifferent features of the provided subject matter. The drawings are notto scale and the relative sizing and placement of structures have beenmodified for clarity rather than dimensional accuracy. Specific examplesof components, values, operations, materials, arrangements, or the like,are described below to simplify the present disclosure.

These are, of course, merely examples and are not intended to belimiting. Other components, values, operations, materials, arrangements,or the like, are contemplated. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper,” “vertical,” “horizontal,” and the like, may be usedherein for ease of description to describe one element or feature'srelationship to another element(s) or feature(s) as illustrated in theFigures. The spatially relative terms are intended to encompassdifferent orientations of the device in use or operation in addition tothe orientation depicted in the Figures. The apparatus and structuresmay be otherwise oriented (rotated by, for example, 90°, 180°, ormirrored about a horizontal or vertical axis) and the spatially relativedescriptors used herein may likewise be interpreted accordingly.

The structures and methods detailed below relate generally to thestructures, designs, and manufacturing methods for LDMOS devices,including high-voltage LDMOS devices. The structures and methodsdetailed below produce improved LDMOS output characteristics, e.g.,on-state Id-Vd tailing, that are associated with higher drain-sideelectrical fields, in order to achieve a suitable combination ofimproved breakdown voltage in the off state (BVoff), resistancespreading (Rsp), and safe operating area (SOA) performance. Previousefforts have included, for example, adding an extra well implant on thedrain side in order to suppress the high electrical field and achieveimproved Id-Vd tailing, but the small-tilt, high-dose, high-energy wellimplants tend to decrease the BVoff while tending to increase thehandling, manufacturing costs, and defect risks as a result of adding anadditional implant mask layer to an already complex manufacturingprocess.

FIG. 1 is a cross-sectional view of an as-manufactured LDMOS structure100 according to some embodiments. The LDMOS structure 100, according tosome embodiments, includes a P-type substrate (P-sub) 102, a field oxide(FOX) region 124 for defining an active area, a deep P-well (DPW) 104formed in the P-type substrate 102, a high-voltage P-type implanted(HVPB) region 108 in the DPW, an N-type drift region doping (NDD) region110 in the DPW adjacent the HVPB region, a shield N-well (SHN) region112 in the DPW adjacent the NDD region, and a shield P-well (SHP) region114 in the P-sub.

The LDMOS structure 100, according to some embodiments, also includes aP-type source contact region 116 and an N-type source contact region 118in the HVPB, an N+ drain contact region 120 in the SHN, and a P+ P-subcontact region 122 in the SHP. The LDMOS structure 100, according tosome embodiments, further includes a gate oxide (Gox) 126 and a gateconductor (POLY) 128, collectively a gate stack 129, provided overadjacent portions of the HVPB and NDD regions. According to someembodiments, the gate stack 129 will include sidewall structures (notshown) and/or portions of the original polysilicon gate conductor thathave been subjected to a silicide or salicide process in order to reducethe resistivity of the gate conductor.

In some embodiments, a portion of the gate stack and the NDD region willbe protected during manufacture by a resist protective oxide (RPO) layer125 that includes alternating layers of silicon dioxide (SiO2) andsilicon nitride (Si3N4) arranged in, for example, an Oxide/Nitride (ON)or an Oxide/Nitride/Oxide/Nitride (ONON) laminar configuration. In someembodiments, an interlayer dielectric (ILD) (140) is then deposited,patterned, and etched to form a series of contact holes that exposeportions of the top surfaces of the P+/N+ source contact regions 116,118, gate stack 129, N+ drain contact 120, and the P+ P-sub contact 122.In some embodiments, an initial metal layer (M0) (not shown) is thendeposited on the ILD to fill the contact openings and, after chemicalmechanical planarization (CMP), to form a source contact 130, a gatecontact 132, a drain contact 134, and a P-sub contact 136 that willprovide electrical contact to subsequent metal layers. In someembodiments, the configuration of the various structures comprisingLDMOS structure 100 will, in operation, produce stronger electricalfields in higher-field regions 138 in which the SHN region 112 abuts theP-sub region 102 and/or DPW region 104.

FIG. 2A is a cross-sectional view of an intermediate structure duringthe process of manufacturing LDMOS structure 200 according to someembodiments which include a P-type substrate (P-sub) 202, a field oxide(FOX) region 224 for defining an active area, a deep P-well (DPW) 204formed in the P-type substrate 202, a high-voltage P-type implanted(HVPB) region 208 in the DPW, an N-type drift doping (NDD) region 210 inthe DPW adjacent the HVPB region, and a SHP region 214 in the P-sub.

FIG. 2B is a cross-sectional view of another intermediate structureduring the process of manufacturing LDMOS structure 200 according tosome embodiments which also include the formation of a P-type sourcecontact region 216 and an N-type source contact region 218 in the HVPB,an N+ drain contact region 220 in the NDD adjacent the field oxideregion 224, and a P+ P-sub contact region 222 in the SHP. The LDMOSstructure 200, according to some embodiments, further includes formationof a gate oxide (Gox) 226 and a gate conductor (POLY) 228, collectivelya gate stack 229, provided over adjacent portions of the HVPB and NDDregions. According to some embodiments, the gate stack 229 will includesidewall structures (not shown) and/or portions of the originalpolysilicon gate conductor that have been subjected to a silicide orsalicide process in order to reduce the resistivity of the gateconductor. In some embodiments, a portion of the gate stack and the NDDregion will be protected during manufacture by a resist protective oxide(RPO) layer 225 that includes alternating layers of silicon dioxide(SiO2) and silicon nitride (Si3N4) arranged in, for example, a two-layerOxide/Nitride (ON) laminar configuration or a four-layerOxide/Nitride/Oxide/Nitride (ONON) laminar configuration.

FIG. 2C is a cross-sectional view of another intermediate structureduring the process of manufacturing LDMOS structure 200 in which aninterlayer dielectric layer 240 is then deposited, patterned, and etchedto form a series of contact holes 242 that expose portions of the topsurfaces of the P+/N+ source contact regions 216, 218, gate stack 229,N+ drain contact 220, the P+ P-sub contact 222, and the RPO layer 225.

FIG. 2D is a cross-sectional view of another intermediate structureduring the process of manufacturing LDMOS structure 200 in which aninitial metal layer (M0) (not shown) is then deposited on the ILD tofill the contact openings and, after chemical mechanical planarization(CMP), to form a source contact 230, a gate contact 232, a drain contact234, a P-sub contact 236, and a field plate contact 244, the field platecontact being closer to the drain contact than the gate contact. Thesecontacts will provide electrical contact to subsequent metal layers,e.g., the metal 1 (M1) layer.

FIG. 2E is a cross-sectional view of another intermediate structureduring the process of manufacturing LDMOS structure 200 in which asecond interlayer dielectric layer 248 is deposited on the contacts. Insome embodiments, the second ILD 248 is etched to expose the topsurfaces of specific contact including, for example, the drain contact234 and the field plate contact (CFP) 244 and remove a portion of thesecond ILD layer between the exposed contacts. A metal layer (M1) (notshown) is then deposited on the second ILD to fill the opening(s)between the exposed contacts and, after chemical mechanicalplanarization (CMP), to form a metal pattern 246 that establishes anelectrical connection between the drain contact 234 and the field platecontact 244. The metal pattern 246 ensures that the same drain voltage(Vd or Vdd) will be applied to both the drain and field plate contactssimultaneously. Additional operations including depositing ILD layers,contact/via patterning, contact/via etching, metal depositions, metalpatterning, and metal etching and/or CMP will be used to complete theintegrated circuit (IC) device.

According to some embodiments, certain of the structural elements shownin the structures of FIG. 1 and FIG. 2E are configured and doped inaccord with a set of design rules associated with the manufacturingprocess being used to create and manufacture the LDMOS device. Someembodiments of the LDMOS devices include regions that are sized anddoped within specified ranges including, for example, in someembodiments, an initial P-sub doping concentration of 10¹⁴-10¹⁵/cm³; theDPW is formed with a doping concentration of 10¹⁵-10¹⁷/cm³ and a depthof 2-3 μm; the NDD is formed with a doping concentration of10¹⁶-10¹⁷/cm³ and a depth of 0.5-1.0 μm; the HVPB is formed with adoping concentration of 10¹⁷-10¹⁸/cm³ and a depth of 1.5-2.5 μm; the SHNis formed with a doping concentration of 10¹⁷-10¹⁸/cm³ and a depth of1-2 μm; the SHP is formed with a doping concentration of 10¹⁷-10¹⁸/cm³and a depth of 1-2 μm; N+ region is formed with a doping concentrationof 10²⁰-10²¹/cm³ and a depth of 0.2-0.3 μm; and the P+ region is formedwith a doping concentration of 10²⁰-10²¹/cm³ and a depth of 0.2-0.3 Thesizing and doping values provided are intended solely for the guidanceof one of ordinary skill in the art and are not to be interpreted asvalues that are critical or required for manufacturing functionalintegrated circuit devices according to some embodiments. Indeed, one ofskill in the art would be able to manufacture functional semiconductordevices in which one or more of the parameters falls outside the notedranges without undue experimentation.

According to some embodiments, certain of the structural elements shownin the structures of FIG. 1 and FIG. 2E are configured anddeposited/grown in accord with a set of design rules associated with themanufacturing process being used to create and manufacture the LDMOSdevice. Some embodiments of the LDMOS devices include regions andelements that are deposited and sized to fall within specified rangesincluding, for example, in some embodiments a FOX depth of 0.3-0.5 μm; aGox thickness of 0.003˜0.03 μm; a gate conductor (POLY) thickness of0.2-0.3 μm with, in some embodiments, a cobalt (Co) and/or titanium (Ti)silicide formed on the gate conductor; an RPO layer total thickness of0.05-0.2 μm; with the O/N/O/N layers in a four-layer RPO layercomprising 0.03-0.09 μm oxide/0.01-0.03 μm nitride/0.03-0.09 μmoxide/0.01-0.03 μm nitride and the O/N layers in a two-layer RPO layercomprising 0.03-0.12 μm oxide/0.02-0.08 μm nitride; and an ILD thicknessof 0.5-1.5 μm. The thickness values provided above are intended solelyfor the guidance of one of ordinary skill in the art and are not to beinterpreted as values that are critical or required for manufacturingfunctional integrated circuit devices according to some embodiments.Indeed, one of skill in the art would be able to manufacture functionalsemiconductor devices in which one or more of the parameters fallsoutside the noted ranges without undue experimentation.

FIG. 3A is an electron density graph from a simulation prepared usingdevice simulation software for an IC device structure generallycorresponding to FIG. 2E. FIG. 3B is an electron density graph from asimulation prepared using device simulation software for an IC devicestructure generally corresponding to FIG. 1 , which lacks the fieldplate contact structure 244 found in FIG. 2E. Comparing the graphspresented in FIGS. 3A and 3B reveals that a reduction in the electrondensity is achieved in a portion of the NDD region 338 near the draincontact that will tend to improve the high-voltage (HV) performance ofthe IC device, particularly with respect to BVoff performance. Devicesimulation software encompasses, for example, Sentaurus Device, amultidimensional (1D/2D/3D) device simulator, or Taurus Medici, a2-dimensional device simulator, both of which are useful for modelingthe electrical, thermal and/or optical characteristics of a wide varietyof semiconductor devices.

FIG. 4A is a graph showing the relative electron density from asimulation prepared using device simulation software for IC devicestructures generally corresponding to FIG. 2E (wf1md—blue) and for an ICdevice structure generally corresponding to FIG. 1 (wf2md—red), whichlacks the field plate contact structure 244 found in FIG. 2E. Comparingthe lines plotted on the graph in FIG. 4A reveals that a higher electrondensity is achieved in the IC structure generally corresponding to FIG.2E.

FIG. 4B is a graph showing the relative electric field strength from asimulation prepared using device simulation software for IC devicesstructure generally corresponding to FIG. 2E (wf1md—blue) and for an ICdevice structure generally corresponding to FIG. 1 (wf2md—red), whichlacks the field plate contact structure 244 found in FIG. 2E. Comparingthe lines plotted on the graph in FIG. 4B reveals that a lower electricfield strength is achieved in the IC structure generally correspondingto FIG. 2E.

FIG. 4C is a graph showing the relative drain current as a function ofdrain voltage from a simulation prepared using device simulationsoftware for IC devices structure generally corresponding to FIG. 2E(wf1md—blue) and for an IC device structure generally corresponding toFIG. 1 (wf2md—red), which lacks the field plate contact structure foundin FIG. 2E. Comparing the lines plotted on the graph in FIG. 4C revealsthat for operating voltages above 14V a lower drain current magnitude isachieved in the IC structure generally corresponding to FIG. 2E. Foroperation voltages about 20V, the improvement in Id-Vd tailing is about10%.

FIG. 5A is an electron density graph from a simulation prepared usingdevice simulation software, also referred to as technologycomputer-aided design (TCAD), for an IC device structure generallycorresponding to FIG. 2E that has been labeled with certain relevantdimensions including D1, the field plate contact (CFP) to gate polydistance; D2, the field plate contact to the silicon surface distance(i.e., the residual thickness of the RPO structure after contact etch);D3, the field plate contact (CFP) width, and Lds, the length of thedrift region between the gate and the drain structures. The variousrelationships between device performance and the dimensional elementsindicated in FIG. 5A, specifically the dimensions Lds, D1, D2, and D3,are presented in FIGS. 5B-5G as detailed below.

FIG. 5B is a graph of the saturated drain current (Idsat) ratio as afunction of a D1/Lds ratio. As reflected in FIG. 5B, the Idsat currentdecreases as the D1/Lds ratio decreases until a ratio of about 0.45 isreached after which the Idsat values are relatively constant.Accordingly, D1/Lds ratios within about 0.35 and 0.7 maintained theIdsat ratio within a range of about 0.92 and 0.96. As reflected in FIG.5B, the Idsat ratio is sensitive to the positioning of the field platecontact 244 relative to the gate structure 226/228 and the drainstructure 220. In particular, if the field plate contact 244 is arrangedtoo close to the gate structure 226/228, i.e., a D1/Lds ratio of lessthan about 0.35, the Idsat ratio will exceed the 0.96 target value.Accordingly, ensuring that the field plate contact 244 is arranged toprovide sufficient separation between the field plate contact 244 andthe gate structure 226/228 will tend to improve the performance of theresulting semiconductor device.

TCAD simulations of LDMOS structures generally corresponding to FIG. 2Eand using various D1/Lds ratios suggest that the Id-Vd tailingimprovements reflected in FIG. 4C are attributable to an increasedelectron concentration near the drain side of the NDD 210 with theincreased electron concentration acting as a buffer for the on-statedepletion area adjacent the drain side N+ contact 220 and therebyreducing the drain side electrical field. The reduced electrical field,in turn, suppresses the impaction ionization and impaction ionizationcurrent near the drain side of the NDD 210, leading to improved Id-Vdtailing performance.

The D1/Lds ratio is critical to achieving the noted improvements in theId-Vd tailing performance of LDMOS devices according to someembodiments, particularly those LDMOS devices operating voltages inexcess of 14V. The lower limit of the D1/Lds ratio will be dependent onthe target maximum Idsat ratio value associated with a particulardesign, but for LDMOS device designs generally corresponding to FIG. 2Eand having a target maximum Idsat ratio value of 0.96, the D1/Lds ratioshould not be less than 0.35 and preferably, at least 0.40. The upperlimit of the D1/Lds ratio will be dependent on the design rulesapplicable to the specific manufacturing process being used tomanufacture the semiconductor device but will be at least 0.7. If thevalue of the D1/Lds ratio is too low, the variability of the Idsat ratiowill increase and will tend to exceed the predetermined target value.Conversely, if the value of the D1/Lds ratio is too high, the placementof the field plate contact 244 will be more likely to violate theminimum contact-to-contact spacing requirements of design rules of theapplicable manufacturing process.

FIG. 5C is a graph of the saturated drain current (Idsat) ratio as afunction of D2. As reflected in FIG. 5C, the Idsat current increased asthe length of D2 (RPO thickness) increased. D2 values within about 0.05and 0.2 μm maintained the Idsat ratio within a range of about 0.92 and0.96. If the D2 value is too low, then the Idsat ratio will fall belowthe lower target value of 0.92. If the D2 value is too high, then theIdsat ratio will fall above the upper target value of 0.96.

FIG. 5D is a graph of the saturated drain current (Idsat) ratio as afunction of D3/Lds. As reflected in FIG. 5D, the Idsat current ratio isrelatively constant (0.94-0.96) for a range of D3/Lds ratios. D3/Ldsratios within a range of about 0.07 to 0.37 maintained the Idsat ratiowithin a range of about 0.94 and 0.96. If the D3/Lds ratio value is toolow, then the field plate contact 244 will be difficult to pattern andetch consistently. If the D3/Lds ratio value is too high, then theeffects of the field plate contact 244 will not be focused on theportion of the NDD region 338 for reducing the electrical field forimproving the HV performance of the device.

FIG. 5E is a graph of the breakdown voltage off (BVoff) reduction as afunction of D1/Lds. As reflected in FIG. 5E, the BVoff reductionimproves as the location of the field plate contact is moved away fromthe gate structure and toward the drain structure. D1/Lds values between0.4 and 0.7 maintained the Idsat ratio within a range of about 0.92 and0.96 while D1/Lds values below about 0.35 exhibited an Idsat ratiogreater than 0.96.

FIG. 5F is a graph of the breakdown voltage off (BVoff) reduction as afunction of D2. As reflected in FIG. 5F, the BVoff reduction isgenerally insensitive to the thickness of the RPO structure.

FIG. 5G is a graph of the breakdown voltage off (BVoff) reduction as afunction of the ratio of D3/Lds. As reflected in FIG. 5G, the BVoffreduction slowly declines as the D3/Lds ratio increases. Accordingly,the D3/Lds ratio will typically be maintained within a range of from 0.1to 0.3.

FIG. 6 is a flowchart of a method 600 of manufacturing an LDMOS deviceaccording to some embodiments corresponding to FIG. 2E that comprise asequential series of operations including operation 602 during which theactive areas are defined on the P-type substrate 202, a field oxide(FOX) region 224 is formed to separate the active areas. According tosome embodiments, a deep P-well (DPW) 204 is then formed in the P-typesubstrate 202.

According to some embodiments of method 600, during operation 604, ahigh-voltage P-type implanted (HVPB) region 208 is formed in the DPW, anN-type drift doping (NDD) region 210 is formed in the DPW adjacent theHVPB region, and a SHP region 214 is formed in the P-sub 202, the SHPregion being separated from the NDD region 210 by the FOX.

According to some embodiments of method 600, operation 606 includesforming a gate stack 229 comprising a layer of gate oxide 226 onadjacent surfaces of the HVPB and NDD regions and forming a layer ofpolysilicon to serve as a gate conductor 228 on the gate oxide.According to some embodiments, a portion of the gate conductor is usedto form a silicide with cobalt (Co), titanium (Ti), or other suitablemetal(s), as well as suitable alloys and mixtures thereof, and therebylower the resistance of the gate conductor 228. In some embodiments, agate sidewall structure (not shown) is formed adjacent the gate stack229.

According to some embodiments of method 600, operation 608 includesforming a P-type source contact region 216 and an N-type source contactregion 218 in the HVPB, an N+ drain contact region 220 in the NDDadjacent the field oxide region 224, and a P+ P-sub contact region 222in the SHP. In some embodiments, operation 608 includes forming a resistprotective oxide (RPO) layer 225 that includes alternating layers ofsilicon dioxide (SiO2) and silicon nitride (Si3N4) arranged in, forexample, a two-layer Oxide/Nitride (ON) laminar configuration or afour-layer Oxide/Nitride/Oxide/Nitride (ONON) laminar configuration.Although the ON and ONON configurations have been utilized successfullyin the manufacture of semiconductor devices, one of skill in the artwould be able to manufacture functional semiconductor devices using oneor more other dielectric materials for forming the RPO 224 structurewithout undue experimentation.

According to some embodiments of method 600, operation 610 includesforming an interlayer dielectric layer 240 that is then patterned andetched to form a series of contact holes 242 that expose portions of thetop surfaces of the P+/N+ source contact regions 216, 218, the gatestack 229, the N+ drain contact 220, the P+ P-sub contact 222, and theRPO layer 225.

According to some embodiments of method 600, operation 612 includesdepositing an initial metal layer (M0) (not shown) on the patterned andetched ILD layer 240 to fill the contact openings and, after chemicalmechanical planarization (CMP), to form a source contact 230, a gatecontact 232, a drain contact 234, a P-sub contact 236, and a field platecontact 244, the field plate contact being closer to the drain contactthan the gate contact. These contacts will provide electrical contact tosubsequent metal layers, e.g., the metal 1 (M1) layer. In someembodiments, the configuration of the various structures comprisingLDMOS structure 200 will, in operation, tend to produce strongerelectrical fields (and, consequently, exhibit lower BVoff values) inhigher-field regions 138 in which the SHN region 112 abuts the P-subregion 102 and/or DPW region 104.

According to some embodiments of method 600, optional operation 614includes forming a second interlayer dielectric layer 248 on thecontacts. In some embodiments, the second ILD 248 is then patterned andetched to expose the top surfaces of specific contacts including, forexample, the drain contact 234 and the field plate contact 244 and aremove portion of the second ILD layer between the exposed contacts. Ametal layer (M1) (not shown) is then deposited on the second ILD 248 tofill the opening(s) between the exposed contacts and, after chemicalmechanical planarization (CMP), to form a metal pattern 246 thatestablishes an electrical connection between the drain contact 234 andthe field plate contact 244. The metal pattern 246 ensures that the samedrain voltage (Vd or Vdd) will be applied to both the drain contact 234and field plate contact 244 simultaneously.

According to some embodiments of method 600, optional operation 616includes depositing additional ILD layers, applying contact/via patternsto the ILD layers, etching the contact/via patterns, depositing metallayers, removing portions of the metal layers using metal patterning andetching and/or CMP to form additional interconnection patterns that willproduce an IC device having the designed functionality. According tosome embodiments of method 600, optional operation 618 includespackaging the completed IC device in a format suitable for use inelectronic equipment. Within embodiments of method 600, operations 612and 614 form the field plate contact 244 and provide for an electricalconnection between the field plate contact 244 and drain contact 234.The formation of these structures allows the drain voltage to be appliedto the field plate contact 244 to achieve the improved HV performance ofthe resulting IC devices as shown in, e.g., FIGS. 3A and 4C.

FIG. 7 is a block diagram of an electronic process control (EPC) system700, in accordance with some embodiments. Methods used for generatingcell layout diagrams corresponding to some embodiments of the LDMOSstructures detailed above, particularly with respect to the addition andplacement of the field plate contact on the RPO structure areimplementable, for example, using EPC system 700, in accordance withsome embodiments of such systems. In some embodiments, EPC system 700 isa general purpose computing device including a hardware processor 702and a non-transitory, computer-readable, storage medium 704.Computer-readable storage medium 704, amongst other things, is encodedwith, i.e., stores, computer program code (or instructions) 706, i.e., aset of executable instructions. Execution of computer program code 706by hardware processor 702 represents (at least in part) an EPC toolwhich implements a portion or all of, e.g., the methods described hereinin accordance with one or more (hereinafter, the noted processes and/ormethods).

Hardware processor 702 is electrically coupled to computer-readablestorage medium 704 via a bus 718. Hardware processor 702 is alsoelectrically coupled to an I/O interface 712 by bus 718. A networkinterface 714 is also electrically connected to hardware processor 702via bus 718. Network interface 714 is connected to a network 716, sothat hardware processor 702 and computer-readable storage medium 704 arecapable of connecting to external elements via network 716. Hardwareprocessor 702 is configured to execute computer program code 706 encodedin computer-readable storage medium 704 in order to cause EPC system 700to be usable for performing a portion or all of the noted processesand/or methods. In one or more embodiments, hardware processor 702 is acentral processing unit (CPU), a multi-processor, a distributedprocessing system, an application specific integrated circuit (ASIC),and/or a suitable processing unit.

In one or more embodiments, computer-readable storage medium 704 is anelectronic, magnetic, optical, electromagnetic, infrared, and/or asemiconductor system (or apparatus or device). For example,computer-readable storage medium 704 includes a semiconductor orsolid-state memory, a magnetic tape, a removable computer diskette, arandom access memory (RAM), a read-only memory (ROM), a rigid magneticdisk, and/or an optical disk. In one or more embodiments using opticaldisks, computer-readable storage medium 704 includes a compact disk-readonly memory (CD-ROM), a compact disk-read/write (CD-R/W), and/or adigital video disc (DVD).

In one or more embodiments, computer-readable storage medium 704 storescomputer program code 706 configured to cause the EPC system 700 (wheresuch execution represents (at least in part) the EPC tool) to be usablefor performing a portion or all of the noted processes and/or methods.In one or more embodiments, computer-readable storage medium 704 alsostores information which facilitates performing a portion or all of thenoted processes and/or methods. In one or more embodiments,computer-readable storage medium 704 stores process control data 708including, in some embodiments, control algorithms, process variablesand constants, target ranges, set points, programming control data, andcode for enabling statistical process control (SPC) and/or modelpredictive control (MPC) based control of the various processes.

EPC system 700 includes I/O interface 712. I/O interface 712 is coupledto external circuitry. In one or more embodiments, I/O interface 712includes a keyboard, keypad, mouse, trackball, trackpad, touchscreen,and/or cursor direction keys for communicating information and commandsto hardware processor 702.

EPC system 700 also includes network interface 714 coupled to hardwareprocessor 702. Network interface 714 allows EPC system 700 tocommunicate with network 716, to which one or more other computersystems are connected. Network interface 714 includes wireless networkinterfaces such as BLUETOOTH, WIFI, WIMAX, GPRS, or WCDMA; or wirednetwork interfaces such as ETHERNET, USB, or IEEE-1364. In one or moreembodiments, a portion or all of noted processes and/or methods, isimplemented in two or more EPC systems 700.

EPC system 700 is configured to receive information through I/Ointerface 712. The information received through I/O interface 712includes one or more of instructions, data, programming data, designrules that specify, e.g., layer thicknesses, spacing distances,structure and layer resistivity, and feature sizes, process performancehistories, target ranges, set points, and/or other parameters forprocessing by hardware processor 702. The information is transferred tohardware processor 702 via bus 718. EPC system 700 is configured toreceive information related to a user interface (UI) through I/Ointerface 712. The information is stored in computer-readable medium 704as user interface (UI) 710.

In some embodiments, a portion or all of the noted processes and/ormethods is implemented as a standalone software application forexecution by a processor. In some embodiments, a portion or all of thenoted processes and/or methods is implemented as a software applicationthat is a part of an additional software application. In someembodiments, a portion or all of the noted processes and/or methods isimplemented as a plug-in to a software application. In some embodiments,at least one of the noted processes and/or methods is implemented as asoftware application that is a portion of an EPC tool. In someembodiments, a portion or all of the noted processes and/or methods isimplemented as a software application that is used by EPC system 700.

In some embodiments, the processes are realized as functions of aprogram stored in a non-transitory computer readable recording medium.Examples of a non-transitory computer readable recording medium include,but are not limited to, external/removable and/or internal/built-instorage or memory unit, e.g., one or more of an optical disk, such as aDVD, a magnetic disk, such as a hard disk, a semiconductor memory, suchas a ROM, a RAM, a memory card, and the like.

FIG. 8 is a block diagram of an integrated circuit (IC) manufacturingsystem 800, and an IC manufacturing flow associated therewith, inaccordance with some embodiments for manufacturing LDMOS devices thatincorporate a field plate contact structure as detailed above. In someembodiments, based on a layout diagram, at least one of (A) one or moresemiconductor masks or (B) at least one component in a layer of asemiconductor integrated circuit is fabricated using manufacturingsystem 800.

In FIG. 8 , IC manufacturing system 800 includes entities, such as adesign house 820, a mask house 830, and an IC manufacturer/fabricator(“fab”) 850, that interact with one another in the design, development,and manufacturing cycles and/or services related to manufacturing an ICdevice 860. The entities in manufacturing system 800 are connected by acommunications network. In some embodiments, the communications networkis a single network. In some embodiments, the communications network isa variety of different networks, such as an intranet and the Internet.

The communications network includes wired and/or wireless communicationchannels. Each entity interacts with one or more of the other entitiesand provides services to and/or receives services from one or more ofthe other entities. In some embodiments, two or more of design house820, mask house 830, and IC Fab 850 is owned by a single larger company.In some embodiments, two or more of design house 820, mask house 830,and IC Fab 850 coexist in a common facility and use common resources.

Design house (or design team) 820 generates an IC design layout diagram822. IC design layout diagram 822 includes various geometrical patternsdesigned for an IC device 860. The geometrical patterns correspond topatterns of metal, oxide, or semiconductor layers that make up thevarious components of IC device 860 to be fabricated. The various layerscombine to form various IC features.

For example, a portion of IC design layout diagram 822 includes variousIC features, such as an active region, gate electrode, source and drain,metal lines or vias of an interlayer interconnection, and openings forbonding pads, to be formed in a semiconductor substrate (such as asilicon wafer) and various material layers disposed on the semiconductorsubstrate. Design house 820 implements a proper design procedure to formIC design layout diagram 822. The design procedure includes one or moreof logic design, physical design or place and route. IC design layoutdiagram 822 is presented in one or more data files having information ofthe geometrical patterns. For example, IC design layout diagram 822 canbe expressed in a GDSII file format or DFII file format.

Whereas the pattern of a modified IC design layout diagram is adjustedby an appropriate method in order to, for example, reduce parasiticcapacitance of the integrated circuit as compared to an unmodified ICdesign layout diagram, the modified IC design layout diagram reflectsthe results of changing positions of conductive line in the layoutdiagram, and, in some embodiments, inserting to the IC design layoutdiagram, features associated with capacitive isolation structures tofurther reduce parasitic capacitance, as compared to IC structureshaving the modified IC design layout diagram without features forforming capacitive isolation structures located therein.

Mask house 830 includes mask data preparation 832 and mask fabrication844. Mask house 830 uses IC design layout diagram 822 to manufacture oneor more masks 845 to be used for fabricating the various layers of ICdevice 860 according to IC design layout diagram 822. Mask house 830performs mask data preparation 832, where IC design layout diagram 822is translated into a representative data file (“RDF”). Mask datapreparation 832 provides the RDF to mask fabrication 844. Maskfabrication 844 includes a mask writer. A mask writer converts the RDFto an image on a substrate, such as a mask (reticle) 845 or asemiconductor wafer 853. The IC design layout diagram 822 is manipulatedby mask data preparation 832 to comply with particular characteristicsof the mask writer and/or requirements of IC Fab 850. In FIG. 8 , maskdata preparation 832 and mask fabrication 844 are illustrated asseparate elements. In some embodiments, mask data preparation 832 andmask fabrication 844 can be collectively referred to as mask datapreparation.

In some embodiments, mask data preparation 832 includes opticalproximity correction (OPC) which uses lithography enhancement techniquesto compensate for image errors, such as those that can arise fromdiffraction, interference, other process effects and the like. OPCadjusts IC design layout diagram 822. In some embodiments, mask datapreparation 832 includes further resolution enhancement techniques(RET), such as off-axis illumination, sub-resolution assist features,phase-shifting masks, other suitable techniques, and the like orcombinations thereof. In some embodiments, inverse lithographytechnology (ILT) is also used, which treats OPC as an inverse imagingproblem.

In some embodiments, mask data preparation 832 includes a mask rulechecker (MRC) that checks the IC design layout diagram 822 that hasundergone processes in OPC with a set of mask creation rules whichcontain certain geometric and/or connectivity restrictions to ensuresufficient margins, to account for variability in semiconductormanufacturing processes, and the like. In some embodiments, the MRCmodifies the IC design layout diagram 822 to compensate for limitationsduring mask fabrication 844, which may undo part of the modificationsperformed by OPC in order to meet mask creation rules.

In some embodiments, mask data preparation 832 includes lithographyprocess checking (LPC) that simulates processing that will beimplemented by IC Fab 850 to fabricate IC device 860. LPC simulates thisprocessing based on IC design layout diagram 822 to create a simulatedmanufactured device, such as IC device 860. The processing parameters inLPC simulation can include parameters associated with various processesof the IC manufacturing cycle, parameters associated with tools used formanufacturing the IC, and/or other aspects of the manufacturing process.LPC takes into account various factors, such as aerial image contrast,depth of focus (“DOF”), mask error enhancement factor (“MEEF”), othersuitable factors, and the like or combinations thereof. In someembodiments, after a simulated manufactured device has been created byLPC, if the simulated device is not close enough in shape to satisfydesign rules, OPC and/or MRC are be repeated to further refine IC designlayout diagram 822.

It should be understood that the above description of mask datapreparation 832 has been simplified for the purposes of clarity. In someembodiments, mask data preparation 832 includes additional features suchas a logic operation (LOP) to modify the IC design layout diagram 822according to manufacturing rules. Additionally, the processes applied toIC design layout diagram 822 during mask data preparation 832 may beexecuted in a variety of different orders.

After mask data preparation 832 and during mask fabrication 844, a mask845 or a group of masks 845 are fabricated based on the modified ICdesign layout diagram 822. In some embodiments, mask fabrication 844includes performing one or more lithographic exposures based on ICdesign layout diagram 822. In some embodiments, an electron-beam(e-beam) or a mechanism of multiple e-beams is used to form a pattern ona mask (photomask or reticle) 845 based on the modified IC design layoutdiagram 822. Mask 845 can be formed in various technologies. In someembodiments, mask 845 is formed using binary technology. In someembodiments, a mask pattern includes opaque regions and transparentregions. A radiation beam, such as an ultraviolet (UV) beam, used toexpose the image sensitive material layer (e.g., photoresist) which hasbeen coated on a wafer, is blocked by the opaque region and transmitsthrough the transparent regions. In one example, a binary mask versionof mask 845 includes a transparent substrate (e.g., fused quartz) and anopaque material (e.g., chromium) coated in the opaque regions of thebinary mask.

In another example, mask 845 is formed using a phase shift technology.In a phase shift mask (PSM) version of mask 845, various features in thepattern formed on the phase shift mask are configured to have properphase difference to enhance the resolution and imaging quality. Invarious examples, the phase shift mask can be attenuated PSM oralternating PSM. The mask(s) generated by mask fabrication 844 is usedin a variety of processes. For example, such a mask(s) is used in an ionimplantation process to form various doped regions in semiconductorwafer 853, in an etching process to form various etching regions insemiconductor wafer 853, and/or in other suitable processes.

IC Fab 850 includes wafer fabrication 852. IC Fab 850 is an ICfabrication business that includes one or more manufacturing facilitiesfor the fabrication of a variety of different IC products. In someembodiments, IC Fab 850 is a semiconductor foundry. For example, theremay be a manufacturing facility for the front end fabrication of aplurality of IC products (front-end-of-line (FEOL) fabrication), while asecond manufacturing facility may provide the back end fabrication forthe interconnection and packaging of the IC products (back-end-of-line(BEOL) fabrication), and a third manufacturing facility may provideother services for the foundry business.

Wafer fabrication 852 includes forming a patterned layer of maskmaterial formed on a semiconductor substrate is made of a mask materialthat includes one or more layers of photoresist, polyimide, siliconoxide, silicon nitride (e.g., Si₃N₄, SiON, SiC, SiOC), or combinationsthereof. In some embodiments, masks 845 include a single layer of maskmaterial. In some embodiments, a mask 845 includes multiple layers ofmask materials.

In some embodiments, the mask material is patterned by exposure to anillumination source. In some embodiments, the illumination source is anelectron beam source. In some embodiments, the illumination source is alamp that emits light. In some embodiments, the light is ultravioletlight. In some embodiments, the light is visible light. In someembodiments, the light is infrared light. In some embodiments, theillumination source emits a combination of different (UV, visible,and/or infrared) light.

Subsequent to mask patterning operations, areas not covered by the mask,e.g., fins in open areas of the pattern, are etched to modify adimension of one or more structures within the exposed area(s). In someembodiments, the etching is performed with plasma etching, or with aliquid chemical etch solution, according to some embodiments. Thechemistry of the liquid chemical etch solution includes one or more ofetchants such as citric acid (C₆H₈O₇), hydrogen peroxide (H₂O₂), nitricacid (HNO₃), sulfuric acid (H₂SO₄), hydrochloric acid (HCl), acetic acid(CH₃CO₂H), hydrofluoric acid (HF), buffered hydrofluoric acid (BHF),phosphoric acid (H₃PO₄), ammonium fluoride (NH₄F), potassium hydroxide(KOH), ethylenediamine pyrocatechol (EDP), TMAH (tetramethylammoniumhydroxide), or a combination thereof.

In some embodiments, the etching process is a dry-etch or plasma etchprocess. Plasma etching of a substrate material is performed usinghalogen-containing reactive gasses excited by an electromagnetic fieldto dissociate into ions. Reactive or etchant gases include, for example,CF₄, SF₆, NF₃, Cl₂, CCl₂F₂, SiCl₄, BCl₂, or a combination thereof,although other semiconductor-material etchant gases are also envisionedwithin the scope of the present disclosure. Ions are accelerated tostrike exposed material by alternating electromagnetic fields or byfixed bias according to methods of plasma etching that are known in theart.

In some embodiments, etching processes include presenting the exposedstructures in the functional area(s) in an oxygen-containing atmosphereto oxidize an outer portion of the exposed structures, followed by achemical trimming process such as plasma-etching or liquid chemicaletching, as described above, to remove the oxidized material and leavebehind a modified structure. In some embodiments, oxidation followed bychemical trimming is performed to provide greater dimensionalselectivity to the exposed material and to reduce a likelihood ofaccidental material removal during a manufacturing process. In someembodiments, the exposed structures may include the fin structures ofFin Field Effect Transistors (FinFET) with the fins being embedded in adielectric support medium covering the sides of the fins. In someembodiments, the exposed portions of the fins of the functional area aretop surfaces and sides of the fins that are above a top surface of thedielectric support medium, where the top surface of the dielectricsupport medium has been recessed to a level below the top surface of thefins, but still covering a lower portion of the sides of the fins.

IC Fab 850 uses mask(s) 845 fabricated by mask house 830 to fabricate ICdevice 860. Thus, IC Fab 850 at least indirectly uses IC design layoutdiagram 822 to fabricate IC device 860. In some embodiments,semiconductor wafer 853 is fabricated by IC Fab 850 using mask(s) 845 toform IC device 860. In some embodiments, the IC fabrication includesperforming one or more lithographic exposures based at least indirectlyon IC design layout diagram 822. Semiconductor wafer 853 includes asilicon substrate or other proper substrate having material layersformed thereon. Semiconductor wafer 853 further includes one or more ofvarious doped regions, dielectric features, multilevel interconnects,and the like (formed at subsequent manufacturing steps).

Thus, IC Fab 850 at least indirectly uses IC design layout diagram 822to fabricate IC device 860. In some embodiments, semiconductor wafer 853is fabricated by IC Fab 850 using mask(s) 845 to form IC device 860.

Details regarding an integrated circuit (IC) manufacturing system (e.g.,manufacturing system 800 of FIG. 8 ), and an IC manufacturing flowassociated therewith are found, e.g., in U.S. Pat. No. 9,256,709,granted Feb. 9, 2016, U.S. Pre-Grant Publication No. 20150278429,published Oct. 1, 2015, U.S. Pre-Grant Publication No. 20140040838,published Feb. 6, 2014, and U.S. Pat. No. 7,260,442, granted Aug. 21,2007, each of which are hereby incorporated, in their entireties, byreference.

In some embodiments, conductive lines are created within the integratedcircuit by depositing a layer of dielectric material on a layer of theintegrated circuit having gate structures therein, followed by formingan opening in the dielectric material at the location of at least onetrack. In some embodiments, metallic seed material is added to exposedsurfaces within the opening in the dielectric material and a layer ofconductive material is added to the opening over the seed layer. In someembodiments, the layer of conductive material is added byelectroplating. In some embodiments, the layer of conductive material isadded by sputtering, e.g., from a metal target. In some embodiments, thelayer of conductive material is added by chemical vapor deposition,including one or more of chemical vapor deposition (CVD),plasma-enhanced chemical vapor deposition (PECVD), atomic layerdeposition (ALD), and the like. In some embodiments, conductive materialon top of the layer of dielectric material is removed from the top ofthe layer of dielectric material by chemical mechanical polishing (CMP)and/or plasma etching to isolate portions of the conductive material inthe openings within the layer of dielectric material.

In some embodiments, the conductive lines along various tracks of theintegrated circuit layout or manufactured integrated circuit areseparated from each other, by removing a length of a conductive linebetween two other conductive lines, and filing the volume of the removedlength of conductive line with dielectric material (e.g., making atrench isolation structure between two conductive lines, wherein thetrench isolation structure and the conductive lines each extend alongthe first direction). In some embodiments, portions of one or moreadjoining conductive lines are isolated by etching through theconductive lines to form an insolation structure that extends in asecond direction different from the direction in which the conductivelines extend through the layer of the integrated circuit.

Integrated circuits according to some embodiments include an n-typedrift region, a gate structure on a first portion of the n-type driftregion, a drain structure in a second portion of the n-type driftregion, the gate structure and the drain structure being separated by adrift region length (Lds), a resist protective oxide (RPO) over then-type drift region and between the gate structure and the drainstructure, and a field plate contact in direct electrical connection tothe resist protective oxide configured for applying a voltage to theresist protective oxide. Other embodiments of the integrated circuitsinclude a conductive structure in direct electrical connection betweenthe drain contact and the field plate contact wherein the appliedvoltage will be the drain voltage, a field plate contact that isseparated from the gate structure by a first distance (D1), with thefirst distance being at least 40% of the Lds, a first distance that isbetween 40% and 70% of the Lds, a field plate contact that has a contactwidth (D3) that is between 10% and 30% of the Lds, a field plate contactincluding a first field plate contact having a first contact width and asecond field plate contact having a second contact width in which thefirst contact and second contact widths are at least 10% of the Lds, aresist protective oxide having an RPO thickness (D2) that is at least10% of the Lds, a resist protective oxide having an RPO thickness (D2)that is between 0.05 μm and 0.2 μm, and/or an Lds of at least 0.5 μm.

Methods of manufacturing according to some embodiments include a seriesof sequential operations including implanting a deep P-well in a P-typesubstrate, implanting an n-type drift region in the deep P-well,depositing a gate structure on a first portion of the n-type driftregion, implanting a drain structure in a second portion of the n-typedrift region, the gate structure and the drain structure being separatedby a drift region length (Lds), depositing a resist protective oxide(RPO) over a third portion of the n-type drift region between the gatestructure and the drain structure, etching a field plate contact openingto expose a surface portion of the resist protective oxide, anddepositing a field plate contact in the field plate contact opening forproviding a direct electrical connection to the resist protective oxide.

Other embodiments of the methods of manufacturing include additional ormodified operations including forming a drain contact for providing adirect electrical connection to the drain structure, forming a metaljumper between the field plate contact and the drain contact, formingthe resist protective oxide (RPO) over a portion of the gate structure,forming sidewall structures adjacent the gate structure, defining aplurality of active areas on the P-type substrate, forming field oxide(FOX) structures between adjacent active areas, positioning the fieldplate contact closer to the drain structure than to the gate structure,positioning the field plate contact on the resist protective oxide (RPO)at an offset from the gate structure of between 40% and 70% of the Lds,positioning the field plate contact on the resist protective oxide (RPO)at a contact point that is separated from the gate structure by between40% and 70% of the Lds, and/or forming a plurality of field platecontacts on the resist protective oxide (RPO) with the field platecontact offset from the gate structure by at least 40% of the Lds.

Methods of improving LDMOS performance according to some embodimentsinclude the operations of depositing an insulating field plate over aportion of an n-type drift region arranged between a gate structure anda drain structure and applying a field plate voltage to the field plateduring device operation, applying a field plate voltage of at least 14V,and/or applying a field plate voltage that is equal to a drain voltage(Vdd) that is applied to the drain of the LDMOS integrated circuitdevice during device operation.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

1. An integrated circuit comprising: a gate structure; a drainstructure, wherein the gate structure and the drain structure areseparated by a drift region length (Lds); a resist protective oxide(RPO) between the gate structure and the drain structure; a field platecontact in direct electrical connection with the resist protectiveoxide; a drain structure contact in direct electrical connection withthe drain structure, wherein the drain structure contact and the fieldplate contact are separated by a dielectric material; and a conductivepattern in electrical contact with both the field plate contact and thedrain structure contact.
 2. The integrated circuit according to claim 1,further comprising: a conductive structure in direct electricalconnection between the drain contact and the field plate contact whereinan applied voltage will be the drain voltage.
 3. The integrated circuitaccording to claim 2, wherein: the field plate contact is separated fromthe gate structure by a first distance (D1), with the first distancebeing at least 35% of the Lds.
 4. The integrated circuit according toclaim 3, wherein: the first distance is between 40% and 70% of the Lds.5. The integrated circuit according to claim 1, wherein: the field platecontact has a contact width (D3), and the contact width is between 10%and 30% of the Lds.
 6. The integrated circuit according to claim 1,wherein: the field plate contact comprises a first field plate contacthaving a first contact width and a second field plate contact having asecond contact width, the first contact width is at least 10% of theLds, and the second contact width is at least 10% of the Lds.
 7. Theintegrated circuit according to claim 1, wherein: the resist protectiveoxide has an RPO thickness (D2), and the RPO thickness is at least 10%of the Lds.
 8. The integrated circuit according to claim 1, wherein: theresist protective oxide has an RPO thickness (D2); and wherein the RPOthickness is between 0.05 μm and 0.2 μm.
 9. The integrated circuitaccording to claim 1, wherein: the Lds is at least 0.5 μm.
 10. A methodof manufacturing an integrated circuit comprising: forming a gatestructure; forming a drain structure, wherein the gate structure and thedrain structure are separated by a drift region length (Lds); forming aresist protective oxide (RPO) structure between the gate structure andthe drain structure; forming a field plate contact in direct electricalconnection to the resist protective oxide structure; forming a drainstructure contact in direct electrical connection with the drainstructure, wherein the drain structure contact and the field platecontact are separated by a dielectric region; and forming a conductivepattern over the dielectric region, wherein the conductive patternelectrically connects the drain structure contact and the field platecontact.
 11. The method according to claim 10, further comprising:forming a sidewall structure adjacent the gate structure; and forming aportion of the resist protective oxide (RPO) structure adjacent thesidewall structure.
 12. The method of claim 11, further comprising:extending the resist protective oxide (RPO) structure over the sidewallstructure and an upper portion of the gate structure.
 13. The method ofclaim 10, further comprising: extending the resist protective oxide(RPO) structure over an upper portion of the gate structure.
 14. Themethod of claim 10, further comprising: defining a plurality of activeareas on the P-type substrate; forming field oxide (FOX) structuresbetween adjacent active areas; and positioning the field plate contactcloser to the drain structure than to the gate structure.
 15. The methodaccording to claim 10, further comprising: positioning the field platecontact on the resist protective oxide (RPO) at an offset from the gatestructure of between 40% and 70% of the Lds.
 16. The method according toclaim 10, further comprising: positioning the field plate contact on theresist protective oxide (RPO) at a contact point that is separated fromthe gate structure by between 40% and 70% of the Lds.
 17. The methodaccording to claim 10, further comprising: forming a plurality of fieldplate contacts on the resist protective oxide (RPO) with the field platecontact offset from the gate structure by at least 40% of the Lds.
 18. Amethod of improving high-voltage performance in a LDMOS integratedcircuit comprising: depositing an insulating field plate over a portionof an n-type drift region; forming a drain structure between theinsulating field plate and an isolation region; forming conductivejumper between the insulating field plate and the drain structure; andapplying a field plate voltage to the conductive jumper during deviceoperation.
 19. The method according to claim 18, wherein: the appliedfield plate voltage is at least 14V.
 20. The method of according toclaim 18, further comprising: applying a drain voltage (Vdd) theconductive jumper.